Structural and Chemical Peculiarities of Nitrogen-Doped Graphene Grown Using Direct Microwave Plasma-Enhanced Chemical Vapor Deposition
نویسندگان
چکیده
Chemical vapor deposition (CVD) is an attractive technique which allows graphene with simultaneous heteroatom doping to be synthesized. In most cases, grown on a catalyst, followed by the subsequent transfer process. The latter responsible for degradation of carrier mobility and conductivity due presence absorbants transfer-related defects. Here, we report catalyst-less transfer-less synthesis nitrogen in single step at reduced temperature (700 °C) via use direct microwave plasma-enhanced CVD. By varying flow rate, explored resultant structural chemical properties nitrogen-doped graphene. Atomic force microscopy revealed more distorted growth process structure introduction gas—the root mean square roughness increased from 0.49 ± 0.2 nm 2.32 nm. Raman spectroscopy indicated that nitrogen-doped, multilayer structures were produced using this method. X-ray photoelectron showed incorporation pure pyridinic N dopants into concentration up 2.08 at.%.
منابع مشابه
Nitrogen-doped graphene by microwave plasma chemical vapor deposition
Available online 6 November 2012
متن کاملEllipsometric investigation of nitrogen doped diamond thin films grown in microwave CH4/H2/N2 plasma enhanced chemical vapor deposition
متن کامل
Graphene sheets via microwave chemical vapor deposition
Centre Of Super-Diamond and Advanced Films (COSDAF), Department of Physics and Materials Science, City University of Hong Kong, Hong Kong SAR, China Department of Physics and Materials Science, City University of Hong Kong, Hong Kong SAR, China c Functional Nano & Soft Materials Laboratory (FUNSOM), Soochow University, Suzhou, Jiangsu 215123, China d Laboratory of Optoelectronic Functional Mate...
متن کاملMicrowave Plasma-Activated Chemical Vapor Deposition of Nitrogen-Doped Diamond. II: CH4/N2/H2 Plasmas
We report a combined experimental and modeling study of microwave-activated dilute CH4/N2/H2 plasmas, as used for chemical vapor deposition (CVD) of diamond, under very similar conditions to previous studies of CH4/H2, CH4/H2/Ar, and N2/H2 gas mixtures. Using cavity ring-down spectroscopy, absolute column densities of CH(X, v = 0), CN(X, v = 0), and NH(X, v = 0) radicals in the hot plasma have ...
متن کاملDirect fabrication of 3D graphene on nanoporous anodic alumina by plasma-enhanced chemical vapor deposition
High surface area electrode materials are of interest for a wide range of potential applications such as super-capacitors and electrochemical cells. This paper describes a fabrication method of three-dimensional (3D) graphene conformally coated on nanoporous insulating substrate with uniform nanopore size. 3D graphene films were formed by controlled graphitization of diamond-like amorphous carb...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Coatings
سال: 2022
ISSN: ['2079-6412']
DOI: https://doi.org/10.3390/coatings12050572